Broadband infrared absorber based on a sputter deposited hydrogenated carbon multilayer enhancing MOEMS based CMOS thermopile performance

Sam Ahmadzadeh, Des Gibson*, Lewis Fleming, David Hutson, Greg McGann, Shigeng Song, Ameen Belke, Allan James, Stephen Wells, Alan Forsyth, Suzanne Bruckshaw

*Corresponding author for this work

Research output: Chapter in Book/Report/Conference proceedingConference contributionpeer-review

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Abstract

Absorber optical coating with maximised broadband infrared absorptance is deposited using pulsed DC sputter deposited hydrogenated carbon. Application to MOEMS CMOS thermopile device is demonstrated with thermopile device output increased 220%.

Original languageEnglish
Title of host publicationOptical Interference Coatings Conference (OIC) 2022
EditorsR. Sargent, A. Sytchkova
PublisherOptica Publishing Group (formerly OSA)
ISBN (Electronic)9781557528209
DOIs
Publication statusPublished - 2022
EventOptical Interference Coatings, OIC 2022 - Vancouver, Canada
Duration: 19 Jun 202224 Jun 2022

Publication series

NameTechnical Digest Papers
PublisherOptica Publishing Group

Conference

ConferenceOptical Interference Coatings, OIC 2022
Country/TerritoryCanada
CityVancouver
Period19/06/2224/06/22

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