Broadband infrared absorber based on a sputter deposited hydrogenated carbon multilayer enhancing MOEMS based CMOS thermopile performance

Sam Ahmadzadeh; Des Gibson; Lewis Fleming; David Hutson; Greg McGann; Shigeng Song; Ameen Belke; Allan James; Stephen Wells; Alan Forsyth; Suzanne Bruckshaw

doi:10.1364/OIC.2022.MC.4

Broadband infrared absorber based on a sputter deposited hydrogenated carbon multilayer enhancing MOEMS based CMOS thermopile performance

Sam Ahmadzadeh, Des Gibson^*, Lewis Fleming, David Hutson, Greg McGann, Shigeng Song, Ameen Belke, Allan James, Stephen Wells, Alan Forsyth, Suzanne Bruckshaw

^*Corresponding author for this work

School of Computing, Engineering and Physical Sciences

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › peer-review

1 Citation (Scopus)

38 Downloads (Pure)

Abstract

Absorber optical coating with maximised broadband infrared absorptance is deposited using pulsed DC sputter deposited hydrogenated carbon. Application to MOEMS CMOS thermopile device is demonstrated with thermopile device output increased 220%.

Original language	English
Title of host publication	Optical Interference Coatings Conference (OIC) 2022
Editors	R. Sargent, A. Sytchkova
Publisher	Optica Publishing Group (formerly OSA)
ISBN (Electronic)	9781557528209
DOIs	https://doi.org/10.1364/OIC.2022.MC.4
Publication status	Published - 2022
Event	Optical Interference Coatings, OIC 2022 - Vancouver, Canada Duration: 19 Jun 2022 → 24 Jun 2022

Publication series

Name	Technical Digest Papers
Publisher	Optica Publishing Group

Conference

Conference	Optical Interference Coatings, OIC 2022
Country/Territory	Canada
City	Vancouver
Period	19/06/22 → 24/06/22

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10.1364/OIC.2022.MC.4

2022 03 21 Ahmadzadeh et al Broadband acceptedAccepted author manuscript, 263 KB

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Ahmadzadeh, S., Gibson, D., Fleming, L., Hutson, D., McGann, G., Song, S., Belke, A., James, A., Wells, S., Forsyth, A., & Bruckshaw, S. (2022). Broadband infrared absorber based on a sputter deposited hydrogenated carbon multilayer enhancing MOEMS based CMOS thermopile performance. In R. Sargent, & A. Sytchkova (Eds.), Optical Interference Coatings Conference (OIC) 2022 Article MC.4 (Technical Digest Papers). Optica Publishing Group (formerly OSA). https://doi.org/10.1364/OIC.2022.MC.4

@inproceedings{a194bf0082224ad4a0cf48b74fc9498d,

title = "Broadband infrared absorber based on a sputter deposited hydrogenated carbon multilayer enhancing MOEMS based CMOS thermopile performance",

abstract = "Absorber optical coating with maximised broadband infrared absorptance is deposited using pulsed DC sputter deposited hydrogenated carbon. Application to MOEMS CMOS thermopile device is demonstrated with thermopile device output increased 220%.",

author = "Sam Ahmadzadeh and Des Gibson and Lewis Fleming and David Hutson and Greg McGann and Shigeng Song and Ameen Belke and Allan James and Stephen Wells and Alan Forsyth and Suzanne Bruckshaw",

note = "Funding Information: This work was supported by InnovateUK as part of a Knowledge Transfer Partnership (KTP) project #104736. Publisher Copyright: {\textcopyright} 2022 The Author(s); Optical Interference Coatings, OIC 2022 ; Conference date: 19-06-2022 Through 24-06-2022",

year = "2022",

doi = "10.1364/OIC.2022.MC.4",

language = "English",

series = "Technical Digest Papers",

publisher = "Optica Publishing Group (formerly OSA)",

editor = "R. Sargent and A. Sytchkova",

booktitle = "Optical Interference Coatings Conference (OIC) 2022",

}

Ahmadzadeh, S, Gibson, D, Fleming, L, Hutson, D, McGann, G, Song, S, Belke, A, James, A, Wells, S, Forsyth, A & Bruckshaw, S 2022, Broadband infrared absorber based on a sputter deposited hydrogenated carbon multilayer enhancing MOEMS based CMOS thermopile performance. in R Sargent & A Sytchkova (eds), Optical Interference Coatings Conference (OIC) 2022., MC.4, Technical Digest Papers, Optica Publishing Group (formerly OSA), Optical Interference Coatings, OIC 2022, Vancouver, Canada, 19/06/22. https://doi.org/10.1364/OIC.2022.MC.4

Broadband infrared absorber based on a sputter deposited hydrogenated carbon multilayer enhancing MOEMS based CMOS thermopile performance. / Ahmadzadeh, Sam; Gibson, Des; Fleming, Lewis et al.
Optical Interference Coatings Conference (OIC) 2022. ed. / R. Sargent; A. Sytchkova. Optica Publishing Group (formerly OSA), 2022. MC.4 (Technical Digest Papers).

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › peer-review

TY - GEN

T1 - Broadband infrared absorber based on a sputter deposited hydrogenated carbon multilayer enhancing MOEMS based CMOS thermopile performance

AU - Ahmadzadeh, Sam

AU - Gibson, Des

AU - Fleming, Lewis

AU - Hutson, David

AU - McGann, Greg

AU - Song, Shigeng

AU - Belke, Ameen

AU - James, Allan

AU - Wells, Stephen

AU - Forsyth, Alan

AU - Bruckshaw, Suzanne

PY - 2022

Y1 - 2022

N2 - Absorber optical coating with maximised broadband infrared absorptance is deposited using pulsed DC sputter deposited hydrogenated carbon. Application to MOEMS CMOS thermopile device is demonstrated with thermopile device output increased 220%.

AB - Absorber optical coating with maximised broadband infrared absorptance is deposited using pulsed DC sputter deposited hydrogenated carbon. Application to MOEMS CMOS thermopile device is demonstrated with thermopile device output increased 220%.

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U2 - 10.1364/OIC.2022.MC.4

DO - 10.1364/OIC.2022.MC.4

M3 - Conference contribution

AN - SCOPUS:85139113157

T3 - Technical Digest Papers

BT - Optical Interference Coatings Conference (OIC) 2022

A2 - Sargent, R.

A2 - Sytchkova, A.

PB - Optica Publishing Group (formerly OSA)

T2 - Optical Interference Coatings, OIC 2022

Y2 - 19 June 2022 through 24 June 2022

ER -

Ahmadzadeh S, Gibson D, Fleming L, Hutson D, McGann G, Song S et al. Broadband infrared absorber based on a sputter deposited hydrogenated carbon multilayer enhancing MOEMS based CMOS thermopile performance. In Sargent R, Sytchkova A, editors, Optical Interference Coatings Conference (OIC) 2022. Optica Publishing Group (formerly OSA). 2022. MC.4. (Technical Digest Papers). doi: 10.1364/OIC.2022.MC.4

Broadband infrared absorber based on a sputter deposited hydrogenated carbon multilayer enhancing MOEMS based CMOS thermopile performance

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