TY - JOUR
T1 - Analytical simulation of RBS spectra of nanowire samples
AU - Barradas, Nuno P.
AU - García Núñez, Carlos
AU - Redondo-Cubero, Andres
AU - Shen, G.
AU - Kung, Patrick
AU - Pau, Jose Luis
N1 - ORCID Reference type: [bibtex]; ORCID Reference: [@article{RID:0525180901704-20, title = {Analytical simulation of RBS spectra of nanowire samples}, journal = {Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms}, year = {2016}, author = {Barradas, Nuno P. and García Núñez, C. and Redondo-Cubero, A. and Shen, G. and Kung, P. and Pau, J. L.}, volume = {371}, pages = {116-120} }]
PY - 2016/3/15
Y1 - 2016/3/15
N2 - Almost all, if not all, general purpose codes for analysis of Ion Beam Analysis data have been originally developed to handle laterally homogeneous samples only. This is the case of RUMP, NDF, SIMNRA, and even of the Monte Carlo code Corteo. General-purpose codes usually include only limited support for lateral inhomogeneity. In this work, we show analytical simulations of samples that consist of a layer of parallel oriented nanowires on a substrate, using a model implemented in NDF. We apply the code to real samples, made of vertical ZnO nanowires on a sapphire substrate. Two configurations of the nanowires were studied: 40 nm diameter, 4.1 μm height, 3.5% surface coverage; and 55 nm diameter, 1.1 μm height, 42% surface coverage. We discuss the accuracy and limits of applicability of the analysis.
AB - Almost all, if not all, general purpose codes for analysis of Ion Beam Analysis data have been originally developed to handle laterally homogeneous samples only. This is the case of RUMP, NDF, SIMNRA, and even of the Monte Carlo code Corteo. General-purpose codes usually include only limited support for lateral inhomogeneity. In this work, we show analytical simulations of samples that consist of a layer of parallel oriented nanowires on a substrate, using a model implemented in NDF. We apply the code to real samples, made of vertical ZnO nanowires on a sapphire substrate. Two configurations of the nanowires were studied: 40 nm diameter, 4.1 μm height, 3.5% surface coverage; and 55 nm diameter, 1.1 μm height, 42% surface coverage. We discuss the accuracy and limits of applicability of the analysis.
KW - simulation
KW - NDF
KW - RBS
KW - nanowires
KW - ZnO
U2 - 10.1016/j.nimb.2015.08.080
DO - 10.1016/j.nimb.2015.08.080
M3 - Article
SN - 0168-583X
VL - 371
SP - 116
EP - 120
JO - Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms
JF - Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms
ER -