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Keyphrases
Ablation
100%
Filtered Water
100%
Debris
100%
Debris Control
100%
Thick Film
100%
Water Immersion
100%
Small-sized
50%
Flow Velocity
50%
Immersion Method
50%
Splashing
33%
Laser Ablation
33%
Closed Immersions
33%
Particle Size
16%
Large-sized
16%
Pressure Loss
16%
Medium Size
16%
Laser Machining
16%
Turbulence
16%
Flow Turbulence
16%
Performance Benefits
16%
Large-area Wafers
16%
Equal Ratios
16%
Laser Micromachining
16%
Bisphenol A Polycarbonate
16%
Laser Etching
16%
Debris Particles
16%
Optical Interface
16%
Controlled Geometry
16%
Flowing Liquid Film
16%
Liquid Flow Rate
16%
Surface Ripples
16%
Ablation Plume
16%
Immersion Liquid
16%
2.5-dimensional
16%
Ripple Effect
16%
Closed Method
16%
Laser Type
16%
Open Immersion
16%
Machining Conditions
16%
Flow Surface
16%
Low Flow Velocity
16%
High Flow Velocity
16%
Material Science
Machining
100%
Laser Ablation
100%
Laser Beam Machining
100%
Thick Films
100%
Polycarbonate
50%
Liquid Film
50%
Engineering
Filtered Water
100%
Ablation Debris
100%
Flow Velocity
100%
Pressure Loss
16%
Flow Turbulence
16%
Duct
16%
Bisphenol
16%
Polycarbonate
16%
Optical Interface
16%
Liquid Flow
16%
Laser Micromachining
16%
Liquid Film
16%
Earth and Planetary Sciences
Flow Velocity
100%
Water Immersion
100%
Thick Films
100%
Laser Ablation
33%
Liquid Flow
16%
Low Flow
16%
Micromachining
16%
Physics
Flow Velocity
100%
Thick Films
100%
Laser Machining
33%
Laser Ablation
33%
Splashing
33%