A comparison between DCMS, HiPIMS and a novel ‘HiPIMS+Kick’ deposition for piezoelectric thin-films

Mhairi Rogan, John O'Donnell, Jason Hrebik, Nick Franzer, Rob Belan, Des Gibson, Kevin L. McAughey, David A. Hughes

    Research output: Chapter in Book/Report/Conference proceeding › Conference contribution

    1 Citation (Scopus)
    231 Downloads (Pure)

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    Material Science

    Engineering