@inproceedings{e5c5735bdbb1401db61eb5c49c9df93d,
title = "A comparison between DCMS, HiPIMS and a novel {\textquoteleft}HiPIMS+Kick{\textquoteright} deposition for piezoelectric thin-films",
abstract = "High power impulse magnetron sputtering (HiPIMS) has been shown to improve optical and semi-conductor thin-film coatings through increased density [1], crystallinity and more control over deposition parameters [2]. Here, HiPIMS and, a new technique, HiPIMS + {\textquoteleft}Kick{\textquoteright} are investigated in relation to deposited piezoelectric coatings and compared with a standard DCMS coating. To assess improvements for acoustic generation, these films have been characterized using SEM and XRD techniques for material parameters, simulations have been done to model acoustic output and further work is to be done to find d33 parameters.",
keywords = "Thin-films, Materials, HiPIMS",
author = "Mhairi Rogan and John O'Donnell and Jason Hrebik and Nick Franzer and Rob Belan and Des Gibson and McAughey, {Kevin L.} and Hughes, {David A.}",
year = "2019",
month = dec,
day = "19",
doi = "10.1109/ULTSYM.2019.8925581",
language = "English",
isbn = "9781728145976",
series = "IEEE Conference Proceedings",
publisher = "IEEE",
pages = "2616--2619",
booktitle = "2019 IEEE International Ultrasonics Symposium (IUS)",
address = "United States",
note = "2019 IEEE International Ultrasonics Symposium, IEEE IUS 2019 ; Conference date: 06-10-2019 Through 09-10-2019",
}