A comparison between DCMS, HiPIMS and a novel 'HiPIMS plus Kick' deposition for piezoelectric thin-films

Mhairi Rogan, John O'Donnell, Jason Hrebik, Nick Franzer, Rob Belan, Des Gibson, Kevin L. McAughey, David A. Hughes

Research output: Chapter in Book/Report/Conference proceedingConference contributionpeer-review

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Engineering & Materials Science