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氢辅助脉冲直流溅射沉积的碳化硼薄膜的红外光学性质与机械性质的研究

Translated title of the contribution: Infrared optical and mechanical properties of boron carbide thin films deposited by hydrogen-assisted pulsed DC sputtering
  • Ruting Chen*
  • , Shigeng Song
  • , Des Gibson
  • , Lewis Fleming
  • , Sam Ahmadzadeh
  • , Hinon Chu
  • , Xiaoling Zhang
    • *Corresponding author for this work

Research output: Contribution to journal › Article › peer-review

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