Investigation of microwave plasma assisted sputter deposition of high performance piezoelectric film based imaging and sensor devices

Recently, there is an increased interest in development of ultrasonic transducers used in industry for material property studies and structural-/health-monitoring, and in medical/research centres for ultrasonic cleaning and high-precision pressure-/weight-measurements. Moreover, this technology would offer useful solutions to current COVID19 pandemic, through proximity sensors used in public places, promoting the application of
distance restrictions between travellers, and through imaging devices to carry out lung ultrasound for early detection of acute respiratory failure.
Novosound Ltd has invented and commercialised a patented low-cost and mass-producible ultrasonic transducer system based on functional thin-film materials, replacing current bulk material based transducers. The innovative transducers offer significant cost reduction, high resolution, and flexibility, providing 3D ultrasonic imaging and sensing capabilities. These have been demonstrated for use in non-destructive testing applications within oil & gas, aerospace, semiconductor manufacturing and wearable medical imaging (e.g.
lab-on-a-chip applications). As such the Novosound Ltd technology provides an exciting opportunity to work on cutting edge research in functional thin-film materials as the basis for a new generation of ultrasonic transducers with societal benefits in health & safety.
This project proposes the use of microwave plasma-assisted sputter deposition (MPAS) technology developed at the Institute of Thin Films, Sensors, and Imaging, aiming at improving the acoustic properties of piezoelectric thin films utilized in the ultrasonic transducers developed by Novosound Ltd. The Fellow has a wide experience in both MPAS and piezoelectric devices (design, fabrication and characterisation), making
this project to be well-aligned with his ongoing investigations and research interest.