Keyphrases
Atomic Force Microscopy
10%
Band-variable Filter
14%
Bandpass Filter
17%
Co-sputtering
14%
DC Sputtering
26%
Deposition Rate
14%
Electron Beam Evaporation
15%
Film Uniformity
13%
Focal Spot
14%
Gravitational Wave Detectors
29%
High-throughput
12%
Hydrogenated Carbon
17%
Ion-assisted
14%
Linear Variable
14%
Linear Variable Filter
16%
Linearly Polarized
12%
Magnetron Sputtering
16%
Magnetron Sputtering Deposition
12%
Mechanical Properties
13%
Microwave Plasma
46%
Mid-infrared
12%
Mirror Coatings
17%
Multilayer Thin Films
17%
Nanostructures
14%
Nondispersive Infrared Gas Sensor
15%
Oblique Angle Deposition
14%
Optical Coatings
48%
Optical Filters
11%
Optical Mirror
14%
Optical Properties
37%
Optical Thin Film
15%
Oxygen Flow
10%
Plasma Ions
16%
Plasma-assisted
39%
Pulsed DC
16%
Reactive Magnetron Sputtering
10%
Reactive Sputtering
19%
Refractive Index
11%
Room Temperature
10%
Rutile
16%
Scanning Electron Microscopy
10%
Silica
19%
Silicon Oxide
10%
Sputter-deposited
24%
Structural Properties
12%
Surface-enhanced Raman Scattering
16%
Tantalum Oxide
14%
TiO2 Thin Film
10%
Transmittance
10%
X Ray Diffraction
15%
Material Science
Al2O3
9%
Annealing
6%
Carbon Dioxide
19%
Cathode
6%
Density
12%
Dielectric Material
6%
Dielectric Spectroscopy
9%
Dynamic Analysis
9%
Film
77%
Film Deposition
7%
Film Growth
5%
Film Thickness
13%
Ion Beam Assisted Deposition
7%
Magnetron Sputtering
25%
Microelectromechanical System
9%
Nanocrystalline Material
21%
Nanorod
9%
Optical Coating
43%
Optical Property
33%
Oxide Compound
53%
Photovoltaics
5%
Refractive Index
21%
Rotating Drums
9%
Scanning Electron Microscopy
13%
Silicon
24%
Silicon Dioxide
12%
Silver
16%
Sputter Deposition
9%
Surface Plasmon
5%
Surface-Enhanced Raman Spectroscopy
23%
Tantalum Oxides
14%
Thin Films
100%
Titanium Dioxide
22%
Vanadium
9%
X-Ray Diffraction
15%
Zinc Oxide
5%
ZnO
18%
Engineering
Assisted Deposition
7%
Atomic Force Microscopy
9%
Bandpass Filter
25%
Crosstalk
10%
Deposited Film
10%
Deposition Method
7%
Dielectrics
6%
Durability Performance
6%
Durables
17%
Electron-Beam Evaporation
6%
Energy Engineering
5%
Experimental Result
8%
Extinction Coefficient
7%
Feature Extraction
6%
Filter Design
5%
Gas Sensor
21%
Glancing Angle
9%
Glass Substrate
7%
Good Agreement
8%
Incident Angle
6%
Light Incident
6%
Low Power Consumption
6%
Magnetron
28%
Mechanical Loss
9%
Microelectromechanical System
6%
Microwave Plasma
32%
Nanomaterial
8%
Nanostructure
8%
Non-Dispersive Infrared Gas Sensor
11%
Optical Density
6%
Optical Filter
9%
Optical Performance
11%
Oxygen Ion
7%
Photodiode
5%
Photovoltaics
10%
Plasma Source
6%
Ray Diffraction
19%
Refractive Index
26%
Room Temperature
13%
Sensor Model
5%
Silicon Oxide
9%
Spectral Range
6%
Spectral Response
7%
Surface Plasmon
5%
Temperature Coefficient
9%
Thermal Sensor
6%
Thermopile
9%
Thin Films
87%
Transmissions
11%
