Keyphrases
Optical Coatings
49%
Microwave Plasma
47%
Plasma-assisted
40%
Optical Properties
38%
Gravitational Wave Detectors
30%
DC Sputtering
26%
Sputter-deposited
25%
Silica
20%
Reactive Sputtering
20%
Bandpass Filter
17%
Mirror Coatings
17%
Hydrogenated Carbon
17%
Multilayer Thin Films
17%
Rutile
16%
Pulsed DC
16%
Magnetron Sputtering
16%
Plasma Ions
16%
Linear Variable Filter
16%
Surface-enhanced Raman Scattering
16%
Nondispersive Infrared Gas Sensor
15%
Optical Thin Film
15%
Electron Beam Evaporation
15%
Deposition Rate
15%
X Ray Diffraction
15%
Co-sputtering
15%
Tantalum Oxide
15%
Optical Mirror
15%
Oblique Angle Deposition
15%
Focal Spot
15%
Ion-assisted
15%
Linear Variable
15%
Band-variable Filter
15%
Nanostructures
14%
Mechanical Properties
14%
Film Uniformity
13%
Magnetron Sputtering Deposition
13%
Mid-infrared
13%
Structural Properties
12%
High-throughput
12%
Linearly Polarized
12%
Optical Density
12%
Refractive Index
12%
Optical Filters
11%
Reactive Magnetron Sputtering
11%
Atomic Force Microscopy
11%
Silicon Oxide
11%
TiO2 Thin Film
10%
Scanning Electron Microscopy
10%
Room Temperature
10%
Oxygen Flow
10%
Material Science
Thin Films
100%
Film
77%
Oxide Compound
53%
Optical Coating
44%
Optical Property
33%
Magnetron Sputtering
25%
Silicon
24%
Titanium Dioxide
23%
Refractive Index
21%
Carbon Dioxide
20%
Surface-Enhanced Raman Spectroscopy
19%
Nanostructure
18%
ZnO
18%
Silver
17%
X-Ray Diffraction
16%
Tantalum Oxides
15%
Scanning Electron Microscopy
14%
Film Thickness
13%
Density
12%
Silicon Dioxide
12%
Surface (Surface Science)
10%
Rotating Drums
10%
Dynamic Analysis
10%
Al2O3
10%
Sputter Deposition
10%
Vanadium
10%
Dielectric Spectroscopy
10%
Microelectromechanical System
10%
Nanorod
9%
Atomic Force Microscopy
8%
Ion Beam Assisted Deposition
7%
Film Deposition
7%
Annealing
7%
Cathode
6%
Zinc Oxide
6%
Photovoltaics
6%
Film Growth
5%
Dielectric Material
5%
Indium Tin Oxide
5%
Cathode Material
5%
Physical Vapor Deposition
5%
Bismuth Ferrite
5%
Niobium
5%
Amorphous Hydrogenated Carbon
5%
Metal Deposition
5%
Nanowire
5%
Carbide
5%
Complementary Metal-Oxide-Semiconductor Device
5%
Amorphous Silicon
5%
Boron
5%
Engineering
Thin Films
88%
Microwave Plasma
33%
Magnetron
30%
Refractive Index
27%
Refractivity
27%
Bandpass Filter
26%
Silicon Dioxide
23%
Gas Sensor
21%
Nanomaterial
20%
Ray Diffraction
19%
Raman Spectra
18%
Durables
17%
Room Temperature
13%
Optical Performance
11%
Non-Dispersive Infrared Gas Sensor
11%
Optical Density
11%
Photovoltaics
11%
Deposited Film
10%
Crosstalk
10%
Optical Filter
10%
Temperature Coefficient
10%
Mechanical Loss
10%
Silicon Oxide
10%
Glancing Angle
10%
Thermopile
10%
Atomic Force Microscopy
10%
Hyperspectral Image
10%
Absorptivity
9%
Good Agreement
8%
Experimental Result
8%
Porosity
8%
Deposition Method
7%
Spectral Response
7%
Oxygen Ion
7%
Glass Substrate
7%
Assisted Deposition
7%
Extinction Coefficient
7%
Electron-Beam Evaporation
6%
Thermal Sensor
6%
Incident Angle
6%
Durability Performance
6%
Microelectromechanical System
6%
Spectral Range
6%
Dielectrics
6%
Light Incident
6%
Plasma Source
6%
Low Power Consumption
6%
Filter Design
6%
Sensor Model
5%
Surface Plasmon
5%
